Anyone knows what the MEMs technology is all about ?? How it work. How it's made?????/. What I found out was – *Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology – MST (in Europe). MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i. E. 0. 001 to 0. 1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They mostly consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors. At these size scales, the standard constructs of classical physics are not always useful. Because of the large surface area to volume ratio of MEMS, surface effects such as electrostatics and wetting dominate volume effects such as inertia or thermal mass. The potential of very small machines was appreciated before the technology existed that could make themsee, for example, Richard Feynman's famous 1959 lecture There's Plenty of Room at the Bottom. MEMS became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics. These include molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing small devices. An early example of a MEMS device is the resonistor an electromechanical monolithic resonator. MEMS basic processes: Deposition processes: One of the basic building blocks in MEMS processing is the ability to deposit thin films of material with a thickness anywhere between a few nanometres to about 100 micrometres. Patterning: Patterning in MEMS is the transfer of a pattern into a material. Etching processes: There are two basic categories of etching processes: Wet etching and dry etching. In the former, the material is dissolved when immersed in a chemical solution. In the latter, the material is sputtered or dissolved using reactive ions or a vapor phase etchant for a somewhat dated overview of MEMS etching technologies.

DigInfo – MEMS, the nanotechnology which is currently taking the world by storm, has been the focus of Ritsumeikan University for a w. . .


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